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Products and technologies

Products and technologies

Changjing furnace

Changjing furnace

model:6”, 8”, 12”
Sic Long Crystal Furnace is suitable for 6-inch or 8-inch SIC substrate growth, medium frequency induction or resistance heating system, process gas quick adjustment system, and under-loading structure, it can realize convenient start-up and maintenance operation, at the same time, the equipment has high-precision temperature control, pressure control ability, process performance is stable and excellent.

Applicable fields

  • Semiconductor
    Semiconductor
  • photovoltaic
    photovoltaic
  • photovoltaic
    photovoltaic

Product parameters

Vacuum degree: Better than 510E-4Pa;
Pressure rise rate: Better than 0.3Pa/H (according to the test method of GB/T 11164-2011);
Vacuum leak rate (helium mass spectrometer leak detector): Better than 110E-9Pa.m3/s;
Heating temperature: Induction heating at 2600℃(Max), accuracy better than +/-0.05%;
Pressure control range: 1-10000Pa;