Vacuum degree: | Better than 510E-4Pa; |
Pressure rise rate: | Better than 0.3Pa/H (according to the test method of GB/T 11164-2011); |
Vacuum leak rate (helium mass spectrometer leak detector): | Better than 110E-9Pa.m3/s; |
Heating temperature: | Induction heating at 2600℃(Max), accuracy better than +/-0.05%; |
Pressure control range: | 1-10000Pa; |